Micro-pump and method for production thereof

摘要

A micro-pump having a cross-sectional area of not more than 5 mm2 and usable as a drive source for the operation of a micro-machine and as the controlled flow of a fluid and a method for the production of this micro-pump are provided. The micro-pump is characterized by comprising a comb-shaped stationary electrodes, a fluid chamber, a piston formed in the fluid chamber, comb-shaped movable electrodes formed integrally with the piston, a conductive film for imparting a grounding potential to the piston and the comb-shaped movable electrodes, and check valves and consequently having a drive source integrally formed therein.