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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06310530(A)
申请公布日期
1994.11.04
申请号
JP19930123518
申请日期
1993.04.27
申请人
NIPPON STEEL CORP
发明人
EGAWA YUICHI
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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