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发明名称
摘要
申请公布号
JPH0679144(U)
申请公布日期
1994.11.04
申请号
JP19930026967U
申请日期
1993.04.23
申请人
发明人
分类号
H01L21/304;H01L21/306;(IPC1-7):H01L21/304
主分类号
H01L21/304
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代理人
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