| 摘要 |
PURPOSE:To perform high speed inspection of the shape of a bonding wire. CONSTITUTION:The position where the wire sensing width minimizes, is sensed as a wire focusing point which is the intersecting point of a bonding wire 15 with the focusing plane on the side with the object to be inspected where focusing is generated. wherein the distance between two wire focusing points is used as a convergence parameter. On the basis of the convergence parameter, the position in vertical direction is presumably determined on the focusing plane of the apex of the bonding wire 15, and a photographing device 24 is moved in the plumb direction by an X-Y-Z stage 32 so that the focusing plane is moved to the presumative apex position, and this procedure is repeated so that the focusing plane is converged at the apex. This lessens the frequency of image entry until the focusing plane converges to the apex. |
