PRODUCTION OF LIQUID CRYSTAL DISPLAY ELEMENT SUBSTRATE, LIQUID CRYSTAL DISPLAY ELEMENT SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL

摘要

PURPOSE:To enhance the fineness and grade of the ferroelectric liquid crystal display element and to enable gradation display by using an insulating film formed by precipitation and growth on a substrate immersed in a soln. as a liquid crystal display substrate. CONSTITUTION:This liquid crystal display element consists of a glass substrate 1-1, a metallic light shielding mask 1-2, an SiO2 film 1-3 formed by an LPD method and display electrodes 1-4. Mo as the metallic light shielding mask material is formed by a sputtering method on the glass substrate 1-1 and is patterned by a photolithographic stage. Adequate concn. conditions of a silicic acid sol are adjusted by previously adding an aq. boric acid soln. in a reaction chamber filled with a soln. satd. with the SiO2 with respect to an aq. ammonium silicofluoride soln. The substrate 1-1 is immersed into this reaction chamber and the dense SiO2 film is formed. Further, an ITO film is formed by a sputtering method on the dense SiO2 film and the display electrodes 1-4 are patterned and formed by the photolithographic stage.