| 摘要 |
<p>PURPOSE:To improve developability and the cut of patterns, to widen the latitude of development and to improve a yield by selectively exposing colored paste after prebaking, then developing this colored paste by an aq. soln. contg. an alkaline and further, developing the paste by an aq. soln. contg. an org. solvent without contg. an amino group. CONSTITUTION:The photosensitive or nonphotosensitive colored paste for the colored filter contg. a polymer having a carboxyl group is applied on the transparent substrate and is selectively exposed after prebaking. The colored paste is then developed after exposing to remove the exposed parts or unexposed part of the colored paste. The colored paste is developed by the aq. soln. contg. the alkaline (first developer) and is further developed by the aq. soln. contg. the org. solvent without contg. the amino group (second developer) at this time. The org. solvent without contg. the amino group is soluble in water and contains at least one kind selected from a group consisting of 2 to 6C alcohol, ketone, cellosolve, ether, ester, amide and suslfoxide.</p> |
