| 摘要 |
PURPOSE:To detect easily in a short time the optimum target quantity of vibration of an ultrasonic motor. CONSTITUTION:This inspection equipment is characteristic in that it comprises load applying means 11 for setting the size of a load to an ultrasonic motor 10 by stages, drive frequency changing means 1 for varying a drive frequency in a predetermined range for each size of loads set, drive frequency detection means 14 for detecting the drive frequency changed, vibration detection means 9 for detecting the change in the quantity of vibration corresponding to the changes in drive frequency, and rotating speed detecting means 18 for detecting the change in the rotating speed corresponding to the change in the drive frequency. |
