AUTOMATIC PHASE SHIFTER ARRANGEMENT METHOD AND AUTOMATIC PHASE SHIFTER ARRANGEMENT DEVICE

摘要

PURPOSE:To facilitate change of mask patterns and to optimize pattern arrangement by alternately arranging phase shifters by giving priority order of the phase shifter arrangement to the mask patterns, thereby forming the contradictory regions of the shifter arrangement as the regions where the pattern shapes are easily changeable so that a pattern change plan in these regions is presented. CONSTITUTION:Combinations of the two patterns arranged in more proximity to each other than by the assigned value of the inputted mask patterns are extracted and the priority order of the phase shifter arrangement is made higher nearer the longer side length adjacent to the other patterns among these combinations of the patterns and two kinds of the phase shifters are alternately arranged in priority order of the shifter arrangement. The change plan of the mask pattern is presented at the contradictory points of the phase shifter arrangement. The change plan is converged in such a manner that the projection images of the mask patterns have a desired distribution.