| 摘要 |
<p>PURPOSE:To provide the active matrix substrate of a driving circuit built-in type which makes a screen larger in size, higher in image quality and higher in fineness and process for production of this substrate. CONSTITUTION:An image display region 2 arranged with TFTs for switching in a matrix form is formed on a glass substrate 1. A signal side driving circuit region 3 and scanning side driving circuit region 4 for driving the TFTs for switching are formed on the upper side and left side of the image display region 2. The respective driving circuit regions 3, 4 are plural regions where the energy intensity in a laser beam spot is smaller than an approximately uniform region. These regions are divided and integrated within the small regions 3-1 to 3-5, 4-1 to 4-4 arranged apart prescribed intervals formed therebetween to prevent the irradiation of the other regions with the ranges where the energy beam intensity of the laser beam is nonuniform at the time of the irradiation of one of the adjacent regions with the laser beam.</p> |
