| 摘要 |
PURPOSE:To increase laser output effectively by connecting a pulse voltage generator with each of split electrodes and controlling the generating time of pulse voltage. CONSTITUTION:One or a plurality of pulse voltage generators 13a-13f are connected with electrodes 11a-11f, 12a-12f split along the optical path of laser light. A reflector 15 is provided at one end part and a timing regulator 14 for regulating the generating time of pulse voltage is connected with the pulse voltage generators 13a-13f. Since the electrodes 11a-11f, 12a-12f are provided independently with pulse voltage generators 13a-13f, glow discharge can take place sequentially at the electrodes 11a-11f, 12a-12f without lowering the voltage. Furthermore, the timing regulator provided for the pulse voltage generators 13a-13f allows sequential generation of traveling wave discharge such that the laser output and efficiency are maximized. |
