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发明名称
TREATMENT
摘要
申请公布号
JPH06310463(A)
申请公布日期
1994.11.04
申请号
JP19930120502
申请日期
1993.04.23
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON YAMANASHI KK
发明人
FUKAZAWA YOSHIO;HOSODA SHOZO
分类号
H01L21/02;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/02
代理机构
代理人
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