OPTICAL-IRRADIATION INSPECTION SYSTEM FOR FLAW DETECTION OF WAFER AND SOLAR CELL

摘要

PURPOSE: To detect crack of a crystal layer in a solar cell by a simple constitution. CONSTITUTION: Light of 1.0μm emitted from a light source 18 and passed through a filter 22 is scattered on a white paper 24 and reflected on a solar panel 16 at various angle. A video camera 12 is placed opposite to the panel 16 to form an image of the panel 16 on which the scattered light is reflected. A light source 20 emitting non parallel light is arranged at designated angle to the panel 16 so as to identify a crack of a cover glass and a crack of a crystal layer. Accordingly, as the crack of the crystal layer is caused as shadow on respective surfaces of the solar cell by the scattered light, the crack can be observed by a monitor.