| 摘要 |
<p>PURPOSE:To increase the variation range of the resistance value by using the specified moisture-sensitive film containing the inorganic polymer composed mainly of Zr as well as to realize the constitution from the moisture-sensitive sensor to the dew-condensation sensor by controlling the humidity-resistance curve. CONSTITUTION:Comb-line electrode 2 and 3 are provided on insulated substrate 1 with the comb lines crossed each other, and lead terminal 5 and 6 are connected to electrode 2 and 3 respectively. The paste is obtained by adding the ethyl alcohol to the mixture of the (semi)conductor powder or the insulator powder, the inorganic polymer composed mainly of Zr such as the oxy-zirconium chloride and the organic higher molecule featuring the compatibility to the inorganic polymer. The paste thus composed is coated on substrate 1, and the burning is given from 100 deg.C up to the temperature at which the organic polymer is never decomposed. Thus, moisture-sensitive film 4 is formed. Film 4 is so rigid that the change on standing is reduced and that a big change of characteristics is eliminated to the change of environment and with a quick response velocity.</p> |
