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发明名称
摘要
申请公布号
JPH0687508(B2)
申请公布日期
1994.11.02
申请号
JP19870172485
申请日期
1987.07.09
申请人
发明人
分类号
H01L29/812;H01L21/338;H01L29/778;H01L29/80;H01L31/0264;H01L31/10;(IPC1-7):H01L31/10;H01L31/026
主分类号
H01L29/812
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代理人
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地址
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