POSITIONING DEVICE AND XY STAGE

摘要

PURPOSE:To enable minute positioning by arranging an ultrasonic wave vibrator which can generate a steady wave and give a drive force to a sliding member by bringing its vibration end in contact with a slide surface. CONSTITUTION:A slide body 17 for moving a stage 11 straight is installed above an ultrasonic wave vibrator 1 so as to be in contact with a steel ball 7. The slide body 17 is formed in a sphere shape whose upper part, is cut, and is held rotatably by roller devices 21 arranged on the inner periphery of a cylindrical roller device supporter erected on the upper surface of a base 15 so as to surround the ultrsonic wave vibrator 1. The lower part of this slide body 17 is formed as a spherical slide surface 17a in contact with the steel ball 7 of the ultrasonic wave vibrator 1 and also the upper part of the slide surface 17a is formed as a spherical roller press-contact surface 17b making contact with the roller 22 of the roller device 21. Surface processing for increasing a friction force to the roller 22 by a rubber coating and the like is applied on the roller press-contact surface 17b. A connection member 18 is fixed in the upper center of the slide body 17.