| 摘要 |
PURPOSE:To realize a clean marking even at the time of a high throughput by inserting each liquid crystal mask into a laser optical path in time to the time of the irradiation of a laser beam and the time of the change of the contents of a marking. CONSTITUTION:Liquid crystal masks 5 and 6 are arranged in the marking pattern forming part 4 of a laser beam 2, and they are movable in a plane perpendicular to the laser beam 2 by a moving device 7. The liquid crystal mask 5 with the indication of marking information completed is set in an irradiation position, the marking information of the liquid crystal mask 5 is marked on a work 15 by emitting a laser beam 2. Next, the liquid crystal mask 5 is set in a non-irradiation position, and the liquid crystal mask 6 is set in the irradiation position. A work 21 is sent to the position of an image-formation optical system 14, and the marking information of the liquid crystal mask 6 is marked on the work 21 by emitting a laser beam. |
