发明名称 |
Thin-film solar cell production method |
摘要 |
A thin-film solar cell includes a thin-film active layer with a p-n Junction and a heat-resistant substrate for mechanically supporting the active layer, which substrate is formed by a plasma coating method. In the plasma coating method, a source material of the substrate is melted with a high-temperature plasma and sprayed onto a base plate by a high-speed gas jet. Since the substrate formed by the plasma coating method is porous, even if an inexpensive material including a lot of impurities is used as a material of the substrate, the impurities are collected in pores of the substrate and never sprout out of the substrate breaking through the thin-film active layer.
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申请公布号 |
US5360745(A) |
申请公布日期 |
1994.11.01 |
申请号 |
US19930002808 |
申请日期 |
1993.01.11 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
SASAKI, HAJIME;NAOMOTO, HIDEO |
分类号 |
H01L21/02;C23C4/12;H01L21/322;H01L31/0368;H01L31/04;H01L31/18;(IPC1-7):H01L31/18;H01L31/039;H01L31/036 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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