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发明名称
COATING FILM FORMING DEVICE
摘要
申请公布号
JPH06306619(A)
申请公布日期
1994.11.01
申请号
JP19930117778
申请日期
1993.04.20
申请人
NIPPON STEEL CORP
发明人
SASAKI JUN;SUGIYAMA KENJI
分类号
C23C14/48;C23C16/50;H01L21/203;(IPC1-7):C23C16/50
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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