High-stability resonators of solid elastic material and oscillators using them

摘要

A preferred embodiment of a resonator embodying the invention comprises essentially a resonating plate, an action electrode and a detection electrode, and a supporting base. The electrodes are placed facing symmetrical narrow edges of the plate, opposite vibration loops, and are coupled to the plate by capacitive, electrostrictive or piezoelectric effect according to the material of which the plate is comprised. A very wide range of elastic solid materials can be used to embody the resonating plate. The plate is attached to the supporting base at points corresponding to vibration nodes of the plate. The plate vibrates advantageously according to a contour mode called Lamé mode. High coefficients of quality in the region of 107 are obtained. The resonators embodying the invention can be easily integrated. To do so, the plate is e.g. embodied in silicon. Such a resonator is included in a high-stability oscillating loop comprising a phase shifter and an amplifier.