发明名称 Method of manufacturing a semiconductor device
摘要 A method of manufacturing a semiconductor device, which comprises the steps of providing a semiconductor substrate having a first primary surface which is designated to form the semiconductor device and a second primary surface opposite from the first primary surface, the substrate containing contaminants therein; forming a boron-doped layer on the second primary surface of the substrate; and absorbing the contaminants into the boron-doped layer.
申请公布号 US5360748(A) 申请公布日期 1994.11.01
申请号 US19930007876 申请日期 1993.01.22
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NADAHARA, SOICHI;YAMABE, KIKUO
分类号 H01L21/322;(IPC1-7):H01L21/306 主分类号 H01L21/322
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