发明名称 |
Method for analyzing irregular shaped chunked silicon for contaminates |
摘要 |
The present invention is a method for analyzing irregular-shaped chunked silicon for low-level contaminates. The method comprises selecting a zonable-chunk of silicon and float-zoning the chunk of silicon to effect a distribution of surface contaminates into the bulk of a monocrystal of silicon. The float-zoned monocrystalline silicon is then processed into a wafer suitable for analysis for low-level contaminates.
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申请公布号 |
US5361128(A) |
申请公布日期 |
1994.11.01 |
申请号 |
US19920942907 |
申请日期 |
1992.09.10 |
申请人 |
HEMLOCK SEMICONDUCTOR CORPORATION |
发明人 |
BOURBINA, MICHAEL;HWANG, LYDIA L.;LUNA, JOAQUIN E.;WHEELOCK, SCOTT A. |
分类号 |
H01L21/66;C30B13/00;C30B29/06;G01N33/20;(IPC1-7):G01N1/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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