MULTILAYERED GLASS-CERAMIC SUBSTRATE AND ITS PRODUCTION

摘要

PURPOSE:To produce a multilayered glass-ceramic substrate having a low dielectric constant and excellent in mechanical strength by firing in a neutral or reducing atmosphere as well as in an oxidizing atmosphere at a low temp. of <=1,000 deg.C. CONSTITUTION:Glass-ceramic layers are made of an inorg. compsn. consisting of 12-59.6wt.% alumina, 18-69.6wt.% borosilicate glass, 1-40wt.% anorthite crystals and 1-5wt.% celsian crystals. Plural conductor layers are laminated while interposing the glass-ceramic layers to produce the objective glass-ceramic substrate.