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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH06306618(A)
申请公布日期
1994.11.01
申请号
JP19930116374
申请日期
1993.04.19
申请人
NIPPEI TOYAMA CORP
发明人
UEDA SETSUO
分类号
C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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