| 摘要 |
<p>PURPOSE:To simultaneously detect positions of one or a plurality of beams (optical beams or high-energy particles). CONSTITUTION:By utilizing a p-i-n or avalanche structure 3 sandwiched between electrodes in the x-axis 2 and the y-axis 4 of NXN, it is used as the beam- position detector of (optical or high-energy) particles. The electrodes in the x-axis 2 or the y-axis 4 are respectively resistive or conductive, and they can simultaneously detect positions of a plurality of particles. By utilizing this element and circuits 5, 6, 7, positions of one or a plurality of particles can be detected simply. The beam-position detector can detect the position of one high-speed particle more precisely than conventional beam-position detectors by using the conductive electrodes in the x-axis or the y-axis and digital circuits 5, 6 for signal processing.</p> |
