| 摘要 |
<p>PURPOSE:To prevent a temperature distribution of a material to be treated from becoming irregular during treating. CONSTITUTION:A distance from a periphery of a conductive layer 15 interposed to be held between insulators 16 and 17 from both upper and lower sides to a surface of the insulator 16 is set shorter than a distance from a center to a surface of the insulator 16, and an electrostatic attraction force generated by applying a voltage from a high voltage DC power source 18 is strengthened higher at a periphery. Thus, a heat transfer rate of the periphery is improved to make a temperature distribution uniform.</p> |
