| 摘要 |
PURPOSE: To provide an acceleration sensor which has a high mechanical long time stability and can be simply produced to measure up to a final acceleration range at a high accuracy. CONSTITUTION: On an SOI substrate a mass 2 hanging on a spring 3 is formed as a micromechanical element in an Si film 1 and means such as e.g. piezoelectric resistance 4 is provided for detecting the displacement of the mass 2 due to the acceleration of the substrate to evaluate the detected displacement, using an electronic circuit. |
