发明名称 |
SUBSTRATE FOR GAP RED LIGHT EMITTING ELEMENT AND MANUFACTURE THEREOF |
摘要 |
PURPOSE:To provide a substrate for a GaP red light emitting element in which plenty of oxygen is introduced and there is an extremely little Ga2O3 deposit produced and manufacture thereof. CONSTITUTION:When a p-type GaP layer 3 doped with Zn and O is grown subsequently on an n-type GaP layer 2 by liquid-phase epitaxial growth on an n-type GaP single-crystal substrate 1, the p-type GaP layer is grown by using a Ga solution including oxygen by high density and when a temperature is lowered down to a predetermined temperature of 980 deg.C or over, the Ga solution is separated from the substrate to end the growth. After the temperature of the growth using the Ga solution including oxygen of high density is lowered down to the predetermined temperature of 980 deg.C or over, the growth can be continued by executing a treatment for reducing a density of oxygen included in the Ga solution. Further, after the temperature of the growth using the Ga solution including oxygen of high density is lowered down to the predetermined temperature of 980 deg.C or over, the growth can be continued by exchanging the growing solution to the Ga solution including oxygen of low density. |
申请公布号 |
JPH06302858(A) |
申请公布日期 |
1994.10.28 |
申请号 |
JP19930109963 |
申请日期 |
1993.04.12 |
申请人 |
SHIN ETSU HANDOTAI CO LTD |
发明人 |
YANAGISAWA MUNEHISA;TAMURA YUKI;ARISAKA SUSUMU;MATSUMOTO HIDETOSHI |
分类号 |
H01L21/368;C30B19/00;H01L21/208;H01L33/30 |
主分类号 |
H01L21/368 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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