| 摘要 |
PURPOSE:To provide the manufacturing method of an oxygen sensor wherein the ionic conductivity of a solid electrolyte plate and the electric insulating property of an insulating layer are ensured and four members have been bonded firmly and integrally. CONSTITUTION:A solid electrolyte plate 11 which is provided with a measuring electrode 12 and a reference electrode 15 on the surface and the back, a ventilation-passage formation plate 16, an insulating layer 21 and a heater base body 22 which is provided with a heating element 25 are fired integrally and manufactured. The solid electrolyte plate 11 is composed of a zirconia powder at an average particle size of 2.0mum or lower, of 5 to 7mol% of Y2O3 and of 0 to 5 pts.wt. of alumina, and a zirconia green sheet in a thickness of 50 to 300mum is used. The heater base body 22 is composed of an alumina powder at an average particle size of 1.0mum or lower, of 0 to 10 pts.wt. of zirconia or yttria-stabilized zirconia, and an alumina green sheet having a thickness of four times or higher the zirconia green sheet is used. A firing operation is performed at 1300 to 1600 deg.C. |
