| 摘要 |
<p>PURPOSE:To prevent dust generation and avoid an increase of the sticking of foreign matter due to dust generation during long-period transportation by smoothly processing the metal of a pellicle frame in order to obtain a dust generation preventing property. CONSTITUTION:The whole face of a pellicle frame is smoothly processed to obtain a dust generation preventing property. To smoothly process the whole face of the pellicle frame, the plating process, low-melting point glass frit process, CVD process, or PVD process such as the sputtering method is applied to the whole face of the pellicle frame, or the coating process of a single organic polymer of various paints is applied, and the process with the organic polymer is optimum in view of the easiness of machining and a large effect. The organic polymer can be optionally selected among nonadhesive and transparent polymers, and acrylic resin, epoxy resin, silicone resin, or fluororesin can be used, for example. The organic polymer is applied by the spray method, dipping method, electrostatic coating method, or electro-deposition coating method.</p> |
