发明名称 PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION
摘要 PURPOSE:To obtain a positive type photosensitive polyimide precursor compsn. easy to produce and excellent in performance by incorporating a specified polymer, a specified compd., a photoreactive monomer and a photo-initiator and/or a sensitizer. CONSTITUTION:This photosensitive polyimide precursor compsn. contains a polymer (a) based on structural units represented by the formula, at least one kind of compd. (b) having no ethylenically unsatd. double bond selected among an N-unsubstd. amido compd., an N-substd. amido compd., a urethane compd. and a urea compd., a photoreactive monomer (c) and a photo-initiator and/or a sensitizer (d). In the formula, R<1> is a tri- or tetravalent org. group having at least two C atoms, R<2> is a divalent org. group having at least two C atoms, R<3> is H, an alkali metal ion, etc., an (n) is 1 or 2. The polymer (a) is convertible into a polymer (polyimide polymer) having imido rings or other circular structure by heating or in the presence of a proper catalyst.
申请公布号 JPH06301209(A) 申请公布日期 1994.10.28
申请号 JP19930090129 申请日期 1993.04.16
申请人 TORAY IND INC 发明人 EGUCHI MASUICHI;ASANO MASAYA
分类号 C08F2/44;C08F2/48;C08K5/16;C08L79/08;G03F7/027;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 主分类号 C08F2/44
代理机构 代理人
主权项
地址