| 摘要 |
PURPOSE:To provide an optical parts or parts for X-rays having a high thermal conductivity, high rigidity and high corrosion resistance and having a high reflectivity at need by using a silicon carbide sintered body which is sintered with boron or a compd. of the boron and carbon or a compd. of the carbon as a sintering assistant, is substantially the single phase of the silicon carbide after sintering and has a high density. CONSTITUTION:The optical parts formed to a required shape by polishing by using the silicon carbide sintered body which is sintered with 0.15 to 1.0wt.% boron or the compd. of the boron in terms of boron and 0.3 to 5wt.% carbon as the sintering assistant, is substantially the single phase of the silicon carbide and has >=2.9g/cm<3> density. The surface of at least a part of this sintered compact 2 is smoothly worked, by which the optical parts and the parts for X-rays having the high thermal conductivity, the high rigidity and the high corrosion resistance are obtd. The smooth surface is coated with a reflection film 1 at need, by which the high reflectivity is obtd. |
