发明名称 WIRING BOARD AND ITS MANUFACTURE
摘要 <p>PURPOSE:To easily obtain a wiring board having a composite function by improving the adhesive property between a wiring pattern and substrate so as to eliminate the need of heating operation for improving the adhesion between the pattern and substrate. CONSTITUTION:At the time of forming a wiring pattern on a substrate 10 with an adhesive layer and barrier layer in between, a conductor pattern 12 is formed by etching a conductor layer and tantalum nitride layer 14 after successively forming the layer 14 and the conductor layer on the substrate 10 and, at the same time, resistors 18 are formed in a circuit by utilizing unetched parts of the layer 14 as resistor sections 18b.</p>
申请公布号 JPH06302951(A) 申请公布日期 1994.10.28
申请号 JP19930087565 申请日期 1993.04.14
申请人 SHINKO ELECTRIC IND CO LTD 发明人 KOYAMA TETSUYA;IIJIMA TAKAHIRO
分类号 H01L23/12;H05K1/16;H05K3/38;H05K3/46;(IPC1-7):H05K3/38 主分类号 H01L23/12
代理机构 代理人
主权项
地址