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发明名称
PLASMA ETCHING APPARATUS
摘要
申请公布号
JPH06302555(A)
申请公布日期
1994.10.28
申请号
JP19930089563
申请日期
1993.04.16
申请人
SUMITOMO METAL IND LTD
发明人
ISHIZAKI YOSHICHIKA
分类号
H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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