发明名称 SINGLE-ELECTRON TRANSISTOR
摘要 PURPOSE:To provide a high-performance single-electron transistor wherein reduction in the size of a quantum dot required to increase an operating temperature and increase in the ratio of a gate capacity required to realize a stable operation to a tunnel capacity are satisfied simultaneously. CONSTITUTION:The transistor has a structure which is composed of at least one quantum dot 1, at least two tunnel junctions 2 formed so as to come into contact with the quantum dot 1 and a gate formed so as to be adjacent to the quantum dot 1, and the gate 5 substantially surrounds at least the quantum dot 1. In addition, the transistor is provided with a substrate, with a lower-part gate formed on the substrate, with a quantum dot formed on the lower-part gate and with an upper-part gate on the quantum dot so as to be connected electrically to the lower-part gate.
申请公布号 JPH06302806(A) 申请公布日期 1994.10.28
申请号 JP19930087104 申请日期 1993.04.14
申请人 HITACHI LTD 发明人 WADA YASUO;MAAKU RATOBITSUCHI
分类号 H01L29/06;H01L29/66;H01L29/68;H01L29/76;(IPC1-7):H01L29/68 主分类号 H01L29/06
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