发明名称 WIRE CLAMPING METHOD AND WIRE CLAMPING DEVICE
摘要 PURPOSE:To make it possible to grasp a wire without inflicting damage and enhance bonding efficiency. CONSTITUTION:A pair of clampers 10A and 10B, which clamp a wire 2, are opened and closed by a voice coil motor 11. The drive control of the motor is carried out by a control part 20. For example, based on the control, the clamper 10B is once moved to a home position, where the clampers are opened slightly larger than the size of the wire 2. There the drive is halted or slowed down and then a clamping force proper to the wire 2 is give to the clampers. A position sensor 30A detects whether or not the clamper 10B has reached the home position. This construction makes it possible to open and close the clampers without generating any oscillation and hence speed up a bonding process without damaging the wire.
申请公布号 JPH06302642(A) 申请公布日期 1994.10.28
申请号 JP19930083730 申请日期 1993.04.12
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 OHASHI YUJI
分类号 H01L21/60 主分类号 H01L21/60
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