SENSING EQUIPMENT OF END POINT OF REACTIVE ION ETCHING,申请号JP19930088255-传众专利搜索

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发明名称	SENSING EQUIPMENT OF END POINT OF REACTIVE ION ETCHING
摘要
申请公布号	JPH06302556(A)	申请公布日期	1994.10.28
申请号	JP19930088255	申请日期	1993.04.15
申请人	NEC YAMAGATA LTD	发明人	OGAWA HIROSHI
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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