| 摘要 |
PURPOSE: To inspect an object without causing any damage thereto or any degradation thereof by providing a transparent platen fitted with a vacuum manifold, and a function for using a beam having variable wavelength and a structure. CONSTITUTION: A transparent platen 20 has a vacuum system capable of generating a laminar air flow for sequentially holding objects at the prescribed position without causing any degradation of a device or damages thereto, thereby allowing the analysis of a beam transmitted through the device. Also, a drive electron device and an interface electron device system are arranged inside an X-Y inspection table 16, so as to be accessible via drawers 14. As a result of the installation of a travel type mounted structure such as the X-Y inspection table 16, the entire picture of the objects can be observed through a visual system camera and an optical system 22. At an inspection process, the objects are exposed to light from a stroboscopic transmission light system 18 under the platen 20. Also, a device during inspection is placed on the platen 20. In this case, an inspection range covers materials from a thin film to an optical fiber cable. |
