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发明名称
SCREENING DEVICE
摘要
申请公布号
JPH06302663(A)
申请公布日期
1994.10.28
申请号
JP19930088273
申请日期
1993.04.15
申请人
HITACHI LTD
发明人
SAKIMOTO MASAKAZU;YOSHIGAMI JIRO;TANAKA MASAKI
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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