GAS PURIFYING METHOD,申请号JP19930082126-传众专利搜索

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发明名称	GAS PURIFYING METHOD
摘要
申请公布号	JPH06300436(A)	申请公布日期	1994.10.28
申请号	JP19930082126	申请日期	1993.04.08
申请人	TOKYO ELECTRON LTD	发明人	IKEDA TORU;SASAKI YOSHIAKI;IWATA TERUO
分类号	F25J3/08;H01L21/302;H01L21/3065;(IPC1-7):F25J3/08	主分类号	F25J3/08
代理机构		代理人
主权项
地址

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