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发明名称
TEST PATTERN
摘要
申请公布号
JPH06302767(A)
申请公布日期
1994.10.28
申请号
JP19930088301
申请日期
1993.04.15
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
MORITA KIYOYUKI
分类号
H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
H01L21/66
代理机构
代理人
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