Method for evaporating metal using a resistance heated, pyrolytic boron nitrided coated graphite boat.

摘要

A method of resistance heating using a graphite container (10) having a graphite body (12) and a pyrolytic boron nitride coating (14) in which a metal charge of predetermined weight is deposited over the coating (14) and the container (10) is heated by the application of a variable source of electrical power to cause the metal charge to fully evaporate in a short interval of time of less than two minutes with the heat cycle controlled to provide a cool down period in each cycle of applied power and with a new metal charge introduced upon completion of each heat cycle in a semi-continuous fashion. <IMAGE>