| 摘要 |
PURPOSE:To provide a substrate processing device which prevents the time loss and spatial loss due to the receiving/delivery of a processed substrate and secures the high operation efficiency of a substrate transferring mechanism. CONSTITUTION:Processing parts 11, 18, etc., are arranged along an annular orbit 110. Two substrate transport robots 150a and 150b carry out the transport of a processed substrate 2 and the take-in/out of the processed substrate into each processing part, through the circular shift in the counterclockwise direction on the annular obit. The substrate transport robot rotates to correct the twist of the electricity feeding wires 121a and 121b in one turn on the annular orbit. Accordingly, the ncessity o receiving and delivery of the processed substrate between the substrate transport robots is obviated. Further, since the substrate transport robot can return to the initial position without passing through a going passage, the operation efficiency of the substrate transport robot is improved. Because of the rotation of the substrate transport robot, the twist of the electricity feeding wire is prevented, and the continuous operation is enabled. |
