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发明名称
POLISHING DEVICE
摘要
申请公布号
JPH06297310(A)
申请公布日期
1994.10.25
申请号
JP19930090098
申请日期
1993.04.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
OTA TSUTOMU
分类号
B24B13/00;B24B13/02;B24B13/04;(IPC1-7):B24B13/00
主分类号
B24B13/00
代理机构
代理人
主权项
地址
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