| 摘要 |
PURPOSE:To make a distance measurement position and a work position on a surface to be worked almost matching and to continuously control the gap of a laser beam working head with high accuracy. CONSTITUTION:A gap sensor for a laser beam machine, which is used for measuring an interval between a surface to be worked and a working head, arranged adjacent to the working head 1 from which a laser beam L1 for working radiates to the surface to be worked, provided so that it is relatively attachable and detachable to a surface to be worked 6, is provided. A laser beam irradiating device 4 for measuring a distance, from which a laser beam L2 for measuring a distance irradiates with a prescribed angle near a position to be irradiated by a laser beam for working on the surface to be worked, and a light receiving device 5 receiving a reflected light of a laser beam for measuring a distance from the surface to be worked, are provided. The wave length of the laser beam for measuring a distance, is made different from that of the laser beam for working. The light receiving device is equipped with a transmission wave length select filter 7 having a characteristic selectively transmitting only a laser beam for measuring a distance. Consequently, a measurable range is enlarged, and accuracy is improved. |
