| 发明名称 |
Coating electronic substrates with silica derived from silazane polymers |
| 摘要 |
A silica coating is formed on an electronic substrate by applying a silazane polymer on the substrate and converting it to silica by heating in an oxidizing environment. The resultant thick planarizing coatings are useful as protective coatings and dielectric inner layers.
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| 申请公布号 |
US5358739(A) |
申请公布日期 |
1994.10.25 |
| 申请号 |
US19940209321 |
申请日期 |
1994.03.10 |
| 申请人 |
DOW CORNING CORPORATION |
发明人 |
BANEY, RONALD H.;CHANDRA, GRISH;HALUSKA, LOREN A. |
| 分类号 |
B05D7/24;C01B33/12;C08L83/04;C08L83/08;H01L21/316;(IPC1-7):B05D3/02 |
主分类号 |
B05D7/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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