| 摘要 |
PURPOSE:To provide an oven for high purification treatment of a graphite member, capable of enhancing the efficiency of the purification, increasing the treatment amount of the graphite member and corresponding also to the purification of a large member, and reducing the failure of a forced exhaust device. CONSTITUTION:In an oven 1 for the high purification treatment of a graphite member, a carbon heat-insulating material 3 is arranged in a closed container 2 so as to surround its inner surface, and a carbon heater 4 is installed in the carbon heat-insulting material 3 without installing any tight box (5: graphite member to be purified, 6: carbon electrode, 7: metal electrode). The closed container 2 is preferably formed in a double wall structure enabling the circulation of a cooling medium. A pipe 8 for charging a halogen gas-containing gas and a gas-exhausting pipe 9 are placed in the treatment oven 1. The gas- exhausting pipe 9 is connected to a forced exhaust device 12 through a dust catcher 10 and a cooling device 11 for trapping the gas-containing gas. |
