发明名称 |
SEMICONDUCTOR MANUFACTURING DEVICE |
摘要 |
PURPOSE:To avoid the bonding of a semiconductor element onto a pressure jig and stably give even pressure force to all of electrodes of the semiconductor element. CONSTITUTION:A conductor wiring provided on a substrate 1 is aligned with an electrode of a semiconductor element 3 which is pressurized against the substrate 1 by a pressurizing jig 6 through the intermediary of a bonding agent to be electrically pressure-connected so that a film 13 with one end thereof connected to a feeding reel 11 and the other end thereof connected to a winding reel 12 may be provided between the pressurizing jig 6 and the semiconductor element 3 to wind up the film 13 by turning at least the winding reel 12. |
申请公布号 |
JPH06295940(A) |
申请公布日期 |
1994.10.21 |
申请号 |
JP19930082019 |
申请日期 |
1993.04.08 |
申请人 |
MATSUSHITA ELECTRON CORP |
发明人 |
YAMAGUCHI AKIYA;TAKESHITA YOSHINOBU |
分类号 |
H01L21/60;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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