发明名称 MANUFACTURE OF PLASMA DISPLAY PANEL
摘要 PURPOSE:To provide a manufacturing method for a plasma display panel having a partition wall to separate a discharge space into unit discharge spaces in which the partition wall can be formed in a form almost at design values. CONSTITUTION:A plasma display panel having a partition wall lid to separate a discharge space into plural unit discharge ranges on at least one side substrate is manufactured. For manufacturing the partition wall 11d, a lower electrode M-1 is formed in a range where this partition wall 11d is to be formed, and a resist pattern 32 having a film thickness corresponding to a height of the partition wall 11d and having an aperture at a corresponding part to a specified unit discharge range is formed on the substrate. The substrate on which the resist pattern is formed is immersed in plating liquid, and metal included in the plating liquid is electroplated on the lower electrode M-1 to form an upper electrode M-2. The lower electrode and the upper electrode are heat-oxidized, an insulation film is formed on an exposed surface of the electrodes, and the electrode on which this insulation film is applied is set as the partition wall 11d.
申请公布号 JPH06295675(A) 申请公布日期 1994.10.21
申请号 JP19930084416 申请日期 1993.04.12
申请人 FUJITSU LTD 发明人 NAKAHARA HIROYUKI;OGAWA TETSUYA
分类号 H01J9/02;H01J9/24;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/36;H01J11/38;H01J11/42 主分类号 H01J9/02
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