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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06295986(A)
申请公布日期
1994.10.21
申请号
JP19930082195
申请日期
1993.04.08
申请人
SEIKO EPSON CORP
发明人
TSUYUKI MASAHIKO
分类号
H01L27/04;H01L21/324;H01L21/822;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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