| 摘要 |
PURPOSE:To obtain a measuring method for ultrasonic vibration which is free from the possibility of being affected by the state of the surface of a sample even when a point of generation of an ultrasonic wave and a point of detection are made to be on the same plane. CONSTITUTION:On the occasion when ultrasonic vibration is induced in a sample 3 by application of a pulse laser from a large-output pulse laser oscillator 1, while a reflected light on the sample 3 of a laser light from a CW laser oscillator 4 applied to the part of application of the pulse laser light of the sample 3 is detected by using a Fabry-Perot interferometer, and the ultrasonic vibration of the sample 3 is measured by a measuring unit 17 on the basis of detected data, the reflected light on the sample 3 is split in two by a split mirror 19 and one light is passed through the interferometer 12 and detected by a photodiode 20, while the other is detected by the photodiode 20 without being passed through the interferometer 12. By comparing the detected data thus obtained, the ultrasonic vibration of the sample 3 is measured. By this constitution, measurement of the ultrasonic vibration being free from the possibility of being affected by the state of the surface of the sample can be executed. |
